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DigiPol Technologies
400 Morris Ave Ste 120
Denville Technical Park
Denville, NJ 07834

Tel: (973) 983-6700
Toll Free: (888) 478-3657
Fax: (973) 983-6290
info@digipoltechnologies.com

Ellipsometers

439 Ellipsometer

DigiPol Technologies features the Elli-SE Spectroscopic Ellipsometer.

For diverse applications, the Elli-SE Spectroscopic Ellipsometer is available in a wide range of configurations.

Elli-SE Spectroscopic Ellipsometer

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of thin film, simultaneously. It is used for the characterization of a variety of materials (e.g., dielectrics, semiconductors, organics, etc.) including AR coatings, OLED, and low (high) -materials.

Specifications Elli-SE

Performance

  • Measuring constants: Film thickness, n, kvs λ
  • Thickness range: 1Å–10µm (depends on film type)
  • Number of layers: More than ten 10 (Depends on film type)
  • Throughput: 15 - 20sec. (Depends on film type)
  • Repeatability, ten measurement average: 2±0.3Å
  • Jones Matrix
  • Dispersion relations: Cauchy, Sellmeier, Tauc-Lorentz, Lorentz, Quantum-Mechanical and more
  • Other features include: Refractive index, Extinction coefficient and optical band gap, Film density and composition, Material’s dispersion function library, User defined models capability, Data import & export functions, Back-side reflection elimination, Models for periodic structure, Extendable library, and Simulation for optimization of angle of Incidence.

Ellipsometer system

  • Light source: Collimated Tungsten halogen lamp (380 - 1,000nm) 
  • Spot size: 1.5mm standard
  • Polarizers: Rotating polarizer& analyzer under stepper motor control
  • Angle of incidence, manually variable: 55°, 60°, 65°, 70°, 75°, 90°
  • Ellipsometric angles:
    • Psi: 0° - 90° with ±0.02° repeatability; Delta: 0° - 180° with ±0.10° repeatability
  • Sample stage: 6" diameter circular
For additional product information or to have a DigiPol Technologies representative contact you, please click here.